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Download a PDF copy of PI Newsletter #34
Ultra-High-Load Motorized Actuator
Ultra-Compact Ultrasonic Drive, Piezo-Motor Stage
PCI-Bus Piezo Nanopositioning Controller a World First
Nanopositioning Z-Stage with Hybrid Piezo/DC-Motor Drive Features 2 Nanometer Linear Encoder
Lever-Amplified Piezoelectric Nanopositioners Boast Precision Flexure Guides
Semi Award for NEXLINE® Nano Drive


Download the Precision
Miniature Stages Brochure



500 page PI Catalog

Get the hardbound, 500
    page PI Catalog
Precision Linear Stage: Motorized / Piezoelectric Micropositioning and Nanopositioning Stages for Ultra Precision Motion Control Applications

Miniature Stages w/
Servo / Stepper Motors

Miniature Stages
Lead-/Ball- Screw Drive
Travel: to 25 mm or 360°
Long Travel Stages w/
Servo / Stepper Motors

Travel: to 306 mm (12")
Forces to 200 N
Resolution to 50 nm 		Hybrid Ultra-Precision Linear Stage

Forces to 100 kN
Sub-nm Resolution
Fast Response 		Voice Coil-Driven Linear Stage

Scanning Freq:10s of Hz
Velocity to 270 mm/s
Travel: 20 mm / 6 mm
Motorized Vertical Stages

ActiveDrive™ Motor
Fast Response
Travel: to 12.5 mm (1/2")

Compact Piezo Motor- Driven Linear Stage

Speed to 800 mm/sec
Acceleration to 20 g
Self-Locking, Non-
    Magnetic, Vacuum
    Compatible
XY Piezo Motor Linear Stage

0.1 µm Resolution
Travel: to 25 x 25 mm
Low Profile, Compact
    Dimensions
Piezo Flexure Linear Nanopositioning Stages

Fast Scanning
Sub-Millisecond
    Response
Sub-nm Precision
Linear
Actuators

Travel: 10 mm-50 mm
Forces to 600 N
Resolution to Sub-nm 		Motion
Controllers

Servo/Stepper/
    Piezomotor Options
1-18 Channel Options
PC-Card, OEM /
    Rack-mount
 

PI is the world leader in precison linear stages positioning systems. In addition, PI also offers a wide selection of innovative motorized piezoelectric nanopositioning and micropositioning stages for ultra precision motion control applications, and precision positioning stages for scientific and industrial applications.

Advantages: ultra-compact precision stages; choice of drives (piezo linear motor, voice-coil linear motor, or DC-servo / stepper with ballscrew or leadscrew); choice of integration (integrated servo driver, integrated controller); piezo-upgrades.

More Information...

Precision Miniature Linear Stages Catalog
Hexapods Brochure
Experience / Custom Systems
Reasons for Choosing PI
Test and Quality Control


Linear Translation Stages

Product Image - Fast Miniature Linear Translation Stage with Integrated Optical Linear Encoder

M-122 Fast Miniature Linear Stage with Integrated Optical Linear Encoder


  • Travel Range 25 mm
  • 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
  • Min. Incremental Motion to 0.2 µm
  • Max. Velocity 20 mm/s
  • Cross-Roll Bearings
  • Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - High-Resolution Micro-linear stages

M-110 High-Resolution Micro-Linear Stages


  • 0.05 Micron Minimum Incremental Motion
  • 5, 15 and 25 mm Travel Ranges
  • Velocity to 1.5 mm/sec.
  • Closed - Loop DC Motors and Stepper Motors
  • Integrated Hall - Effect Limit and Reference Switches
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Product Image - High-Resolution Micro-Linear Stages with Ballscrew Drive

M-110.2 - M-112.2 High-Resolution Micro-Linear Stages with Ballscrew Drive


  • 5 to 25 mm Travel Ranges
  • 5000 h MTBF
  • Very Cost Effective
  • 200 Nanometer Minimum Inc. Motion
  • Hall - Effect Limit & Reference Switches
  • Recirculating Ballscrew for Extended Lifetime
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine Micro Piezomotor Linear Drive

P-652 PILine® Micro Piezomotor Linear Drive


  • Cost-Effective, High-Volume-Production Drive
  • Piezo Micro-Motor: 9.0 x 6.5 x 2.4 mmł
  • Travel Range 3.2 mm
  • Velocity to 80 mm/s
  • Self-Locking
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine Miniature Linear Stages with Ultrasonic Piezo Linear Motors

M-661 - M-662 PILine® Miniature Linear Stages with Ultrasonic Piezo Linear Motors


  • Smallest Linear Stage with High-Speed Linear Motor Drive
  • 20 mm Travel Range
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Resolution to 50 Nanometer
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine Miniature Linear Stages

M-663 PILine® Miniature Linear Stages with Closed-Loop Ultrasonic Piezo Linear Motors


  • Smallest Linear Stage with Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 mm Travel Range
  • Velocity up to 500 mm/s
  • Accelerations up to 20 g
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions Available
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - PILine Miniature Linear Stages with Closed-Loop Ultrasonic Piezo Linear Motors

M-664 PILine® Miniature Linear Stages with Closed-Loop Ultrasonic Piezo Linear Motors


  • Travel Range 25 mm
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest
Back to Top Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - M-665 PILine® Low-Profile Translation Stages

M-665 PILine® Low-Profile Linear Stages with Closed-Loop Ultrasonic Piezo Linear Motors


  • 50 mm Travel
  • Low-Profile, only 26.5 mm
  • Velocity to 400 mm/s
  • Acceleration to 20 g
  • 0.1 Micron Linear Encoder (Direct-Motion Metrology)
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions to 10-8 hPa Available
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Product Image - PILine Low-Profile Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motors

M-682 Compact Closed-Loop Linear Stage with High-Force Powerful Piezomotor Drive


  • Integration of the Powerful PILine® RodDrive
  • Low Profile, Compact Dimensions
  • Max. Velocity 350 mm/s
  • Up to 7 N Pushing Force
  • Direct Metrology Linear Encoder, 0.1 µm Resolution
  • Non-Magnetic and Vacuum-Compatible Versions Available
Product Description | Specs / Drawings | Ordering Info | PDF

Product Image - Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders

M-686 Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders


  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
  • 25 x 25 mm Travel Ranges
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
  • Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning stages
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Series of Miniature Translation Stages

M-311 – M-318 Miniature Linear Stage


  • Extremely Compact
  • All-Stainless-Steel Construction
  • X, XY and XYZ Versions
  • Optional PiezoMike for Nanometer Resolution
  • 4 mm Clear Aperture
  • Linear Ball Bearings
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings

M-011 Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings


  • Travel Range to 15 mm
  • Compact Side Drive
  • Straightness/Flatness ≤ 0.2 Micron
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micron Resolution with Closed-Loop DC Motor
  • 5 Nanometer Resolution with Closed-Loop PZT Drive
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Product Image - Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings

M-014 Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings


  • Travel Range 25 mm
  • Compact Side Drive
  • Straightness/Flatness ≤0.3 Micron
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micron Resolution with Closed-Loop DC Motor
  • 5 Nanometer Resolution with Closed-Loop PZT Drive
  • 30 mm Ř Clear Aperture
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Translation Stage with Crossed Roller Bearings

M-126 Translation Stage with Crossed Roller Bearings


  • To 25 mm Travel Range
  • Manual, DC-Servo and Stepper-Motor Drives
  • ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Crossed Roller Bearings
  • <0.1 Micron Resolution
  • XY and XYZ Combinations
  • Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - High-Resolution Translation Stage with Stepper and DC Motor Drives

M-403, M-404, M-413, M-414 High-Resolution Linear Stage with Stepper and DC Motor Drives


  • Cost-Effective Design
  • Modular System with 4 Series: M-403, M-404, M-413, M-414
  • Preloaded Leadscrews or Recirculating Ball Screws
  • Travel Ranges from 25 to 300 mm
  • Stress-Relieved Aluminum Base 80 and 120 mm Width
  • Minimum Incremental Motion to 0.1 Micron
  • Resolution to 0.017 Micron
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Product Image - High-Precision Translation Stages with Crossed Roller Bearings

M-400 Series High-Precision Linear Stages with Crossed Roller Bearings


  • Travel Ranges to 150 mm
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Crossed Roller Bearings
  • Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Manual Knob for Convenient Position Adjustment
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Ultra-Compact, High-Accuracy Translation Stages

M-605 Ultra-Compact, High-Accuracy Linear Stage


  • Integrated Linear-Scale Encoders for Highest Accuracy
  • Travel Ranges 25 mm (1") and 50 mm (2")
  • Velocity up to 50 mm/sec.
  • Active Drive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact, Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 20 kg
  • >20,000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Low-Profile Translation Stage with Ballscrew Drives

M-505 Low-Profile Linear Stages with Ballscrew Drives


  • Travel Ranges to 150 mm (6 inches)
  • Velocity up to 50 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 100 kg
  • > 20,000 Hours MTBF
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Product Image - Low-Profile, High-Load Translation Stages with Ballscrew Drives

M-511 · M-521 · M-531 Low-Profile, High-Load Linear Stages with Ballscrew Drives


  • Travel Ranges to 306 mm (12")
  • Velocity up to 125 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Linear-Scale Encoders for Highest Accuracy
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contacting Origin and Limit Switches
  • PIIntelliStage™ Version with Integrated Controller
  • Load Capacity 100 kg
  • >20000 Hours MTBF
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Hybrid Scanning System

M-511.HD Long-Travel, High-Speed Nanopositioning Systems


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 4 Nanometer Linear Encoder Resolution
  • 100 mm Travel
  • Velocities to 125 mm/sec
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces with Minimal Power
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Voice Coil Scanning Stage
Product Image - Voice-Coil Scanning System

V-106 Long-Travel, High-Dynamics Scanning System with Voice Coil Drives


  • Fast Scanning and Positioning
  • Scanning Frequency 10s of Hz
  • Travel Ranges of 20 mm and 6 mm
  • Velocity up to 270 mm/s
  • 0.1 Micron Linear Encoder
  • Available PCI-Card Controller with On-Board Amplifiers
Product Description | Specs / Drawings | Ordering Info | PDF
Vertical Translation Stages

Product Image - IHera Vertical Piezo Nanopositioning Stages with Direct Metrology

P-620.Z · P-621.Z · P-622.Z PIHera® Piezo-Z Nanopositioning Stages with Direct Metrology


  • Z-Axis Travel to 400 Micron
  • Low Profile
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - Vertical Micropositioning Stage

M-501 Vertical Micropositioning Stage


  • Travel Range 12.5 mm (1/2")
  • Ultra-High-Resolution Encoder
  • ActiveDrive™ Motor
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Origin and Limit Switches
  • >20,000 Hours MTBF
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Parametric Search      Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - High-Load Vertical Micropositioning Stage

M-451 High-Load Vertical Micropositioning Stage


  • 3 Nanometer Design Resolution
  • 12 kg Load Capacity, High Stiffness
  • <100 Nanometer Minimum Incremental Motion
  • 12.5 mm (1/2") Travel Range
  • ActiveDrive™ Motor
  • Compatible with Leading Industrial Motion Controllers
  • Non-Contact Origin and Limit Switches
  • Mounting Platform for P-500 and PIMars™ Piezo- Nanopositioning Systems
  • Self Locking

Product Description | Specs / Drawings | Ordering Info | PDF
Product Image - M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage

M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments


Product Description | Specs / Drawings | Ordering Info | PDF
More PI Products...

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Hexapods
Flexure Stages
Nanopositioning Controllers
Nanofocusing Scanning Objectives


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