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Miniature Linear Stages Brochure

530 page PI Catalog
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    page PI Catalog

Precision Linear Stage Positioners


Miniature Linear Stages
Motorized Precision Linear Stage

Miniature Stages
Lead-/Ball- Screw Drive
Long Travel Linear Stages
Motorized Precision Linear Stage

Travel: to 306 mm (12")
Resolution to 50 nm
Ultra-High Precision Stage
Motorized Precision Linear Stage

Nanometer Resolution
Fast Response
High-Speed Linear Stage
Motorized Precision Linear Stage

Scanning Freq:10s of Hz
Velocity to 270 mm/s
Linear Z-Stage (Elevation Stage)
Motorized Precision Linear Stage

ActiveDrive™ Motor
Fast Response

Piezo Linear Positioners
Motorized Precision Linear Stage

Speed to 800 mm/sec
Self-Locking, Vacuum
Precision XY Linear Stage
Motorized Precision Linear Stage

0.1 µm Resolution
Travel: to 25 x 25 mm
Piezo Flexure Linear Positioners
Motorized Precision Linear Stage

Fast Scanning
Nanometer Precision
Linear
Actuators

Motorized Precision Linear Stage

Travel: 10 mm-50 mm
High Force &Resolution
Motion
Controllers

Motorized Precision Linear Stage

Servo/Stepper/Piezo
1-18 Channel
 

PI is a leader in high precison linear stage positioning systems. In addition to high accuracy linear tables, PI also offers a wide selection of innovative motorized piezoelectric nano-positioning and micro-positioning stages for motion control applications, and precision positioning stages for scientific and industrial applications.

Advantages: choice of drives (piezo linear motor, voice-coil linear motor, or DC-servo / stepper with ballscrew or leadscrew); choice of integration (integrated servo driver, integrated controller); piezo-upgrades.

More Information...

Precision Miniature Linear Stages Catalog
Hexapods Brochure
Experience / Custom Systems
Reasons for Choosing PI
Test and Quality Control


Precision Linear Translational Stages

Motorized Precision Linear Stage, Miniature Linear Translational Stage

M-122 Fast High Precision Miniature Linear Stage with Integrated Optical Linear Encoder


  • Compact High Precision Linear Table
  • Motion Range 25 mm
  • 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability
  • Min. Incremental Motion to 0.2 µm
  • Max. Velocity 20 mm/s
  • Cross-Roller Bearings
  • Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage High-Resolution Precision Linear Stages with Ballscrew Drive

High-Precision Miniature Linear Stages with Ballscrew: M-110.2 - M-112.2 Drive


  • Small Precision Linear Traslational Tables, 5 to 25 mm Motion Ranges
  • 5000 h MTBF
  • Very Cost Effective
  • 200 Nanometer Minimum Inc. Motion
  • Hall - Effect Limit & Reference Switches
  • Recirculating Ballscrew for Extended Lifetime
Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage NEXACT Miniature Linear Stage

Miniature Precision Linear Stage with NEXACT® Piezo Stepping Motor Drive


  • High Resolution Linear Translational Stage with Closed Loop Motor
  • Motion Range 20 mm Self Locking at Rest, no Heat Generation, no Servo Dither
  • Compact Design: 70 x 50 x 20 mm
  • Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation
  • Integrated Linear Encoder Option for Highest Accuracy with 20 Nanometer Resolution
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage NEXACT Miniature Linear Stage

N-664 High-Resolution Precision Translation Table with NEXACT® Piezo Stepping Motor Drive


  • Motion Range 30 mm
  • Encoder resolution
  • 0.5 nm Minimal incremental motion
  • 2 nm Excellent guiding accuracy
  • Max. velocity 10 mm/s
Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage PILine Miniature Linear Stages with Ultrasonic Piezo Linear Motors

PILine® Miniature Precision Linear Stage with Ultrasonic Piezo Linear Motors, M-661, M-662


  • Smallest Linear Table with High-Speed Linear Motor Drive
  • 20 mm Motion Range
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Resolution to 50 Nanometer
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage PILine Miniature Linear Stages

Precision Miniature Linear Stage with Closed-Loop Ultrasonic Piezo Linear Motors, M-663


  • Smallest Precision Linear Table with Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 mm Motion Range
  • Velocity up to 500 mm/s
  • Accelerations up to 20 g
  • Resolution to 0.1 Micron
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions Available
Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage PILine Miniature Linear Stages with Closed-Loop Ultrasonic Piezo Linear Motors

Low Profile Precision Linear Stage with Closed-Loop Ultrasonic Piezo Linear Motors: M-664


  • Compact and High Precision Linear Table, with 25 mm Motion Range
  • Max. Velocity 400 mm/s
  • Ultra-Low Profile, 15 mm
  • Direct Metrology Linear Encoder with 0.1 µm Resolution
  • High Guiding Accuracy with Crossed Roller Bearings
  • Compact XY Combinations
  • Piezo Linear Motor with 6 N Drive Force
  • Self Locking at Rest
Back to Top Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage M-683
PILine® Low-Profile Translational Stages

M-683 Precision Linear Translational Stage; Low-Profile; High-Speed with Ultrasonic Piezomotor, Direct Position Metrology


  • Low Profile Linear Table: Only 21 mm Height
  • Max. Velocity 350 mm/
  • Compact XY Combination Possible
  • Up to 6 N Force Generation
  • Direct Metrology Linear Encoder, 0.1 µm Resolution
  • Motion Ranges 50 mm
  • Excellent Guiding Accuracy Through Crossed Roller Bearings
  • PILine®: Non-Magnetic and Vacuum-Compatible Working Principle
  • Self-Locking at Rest
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Parametric Search      Description | Technical Data / Drawings | Ordering Info | PDF

Motorized Precision Linear Stage Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders

XY Linear Stage with Linear Encoders, Piezo Motor, Low-Profile: M-686


  • XY Linear Table: 25 x 25 mm Motion Ranges
  • Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s
  • Integrated Linear Encoders with 0.1 µm Resolution
  • Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint
  • Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning stages

Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage Series of Miniature Translational Stages

M-311 – M-318 Miniature Linear Stage


  • Extremely Compact Linear Table Family
  • All-Stainless-Steel Construction
  • X, XY and XYZ Versions
  • Optional PiezoMike for Nanometer Resolution
  • 4 mm Clear Aperture
  • Linear Ball Bearings
Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings

M-011 Ultra-High-Precision Linear Stage, Side-Drive with Magnetic-Kinematic Bearings


  • Precision Linear Table with extremely Straight / Flat Motion: ≤ 0.2 Micron
  • Motion Range to 15 mm
  • Compact Side Drive
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micro-MeterResolution with Closed-Loop DC Motor
  • 5 Nanometer Resolution with Closed-Loop PZT Drive
Back to Top
Parametric Search      Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings

M-014 Ultra-High-Precision Linear Stage, Side-Drive Stage with Magnetic-Kinematic Bearings


  • Precision Linear Table with extremely Straight / Flat Motion: ≤ 0.3 Micron
  • Motion Range 25 mm
  • Compact Side Drive
  • PZT Drive for Scanning and Tracking Applications
  • 0.1 Micro-MeterResolution with Closed-Loop DC Motor
  • 5 Nanometer Resolution with Closed-Loop PZT Drive
  • 30 mm Ř Clear Aperture
Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage Translational Stage with Crossed Roller Bearings

M-126 Translation Stage with Crossed Roller Bearings


  • Economical High Precision inear Table with 25 mm Motion Range
  • Manual, DC-Servo and Stepper-Motor Drives
  • ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Crossed Roller Bearings
  • <0.1 Micro-MeterResolution
  • XY and XYZ Combinations
  • Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage High-Resolution Translational Stage with Stepper and DC Motor Drives

High-Resolution Precision Linear Stage with Stepper and DC Motor Drives: M-403, M-404, M-413, M-414


  • Cost-Effective Linear Table Family
  • Modular System with 4 Series: M-403, M-404, M-413, M-414
  • Preloaded Leadscrews or Recirculating Ball Screws
  • Motion Ranges from 25 to 300 mm
  • Stress-Relieved Aluminum Base 80 and 120 mm Width
  • Minimum Incremental Motion to 0.1 Micro-Meter
  • Resolution to 0.017 Micro-Meter
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Parametric Search      Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage High-Precision Translational Stages with Crossed Roller Bearings

M-400 Series High-Precision Linear Stages with Crossed Roller Bearings


  • High-Precision Linear Table Series with 50, 100 & 150 mm Motion Range
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Crossed Roller Bearings
  • Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option
  • Compatible with Leading Industrial Motion Controllers
  • Manual Knob for Convenient Position Adjustment
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage Ultra-Compact, High-Accuracy Translational Stages

M-605 Ultra-Compact, High-Accuracy Linear Stage


  • Ultra-Precision Linear Table with Integrated Linear-Scale Encoders
  • Motion Ranges 25 mm (1") and 50 mm (2")
  • Velocity up to 50 mm/sec.
  • Active Drive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact, Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 20 kg
  • >20,000 Hours MTBF
Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage Low-Profile Translational Stage with Ballscrew Drives

M-505 Low-Profile Linear Stages with Ballscrew Drives


  • Precision Linear Table with Zero-Backlash Recirculating Ballscrews
  • Motion Ranges to 150 mm (6 inches)
  • Velocity up to 50 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Non-Contact Direction-Sensing Origin Switch
  • Non-Contact Limit Switches
  • Load Capacity 100 kg
  • > 20,000 Hours MTBF
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Parametric Search      Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage Low-Profile, High-Load Translational Stages with Ballscrew Drives

M-511 · M-521 · M-531 Low-Profile, High-Load Linear Stages with Ballscrew Drives


  • High-Load Linear Tables with Zero-Backlash Recirculating Ballscrews
  • Motion Ranges to 306 mm (12")
  • Velocity up to 125 mm/sec.
  • ActiveDrive™ Motors
  • Compatible with Leading Industrial Motion Controllers
  • Linear-Scale Encoders for Highest Accuracy
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Non-Contacting Origin and Limit Switches
  • PIIntelliStage™ Version with Integrated Controller
  • Load Capacity 100 kg
  • >20000 Hours MTBF
Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage Hybrid Scanning System

M-511.HD Long-Travel, High-Speed Nanopositioning Table


  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 4 Nanometer Linear Encoder Resolution
  • 100 mm Motion Range
  • Velocities to 125 mm/sec
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments
  • High Drive and Holding Forces with Minimal Power
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Parametric Search      Description | Technical Data / Drawings | Ordering Info | PDF
Voice Coil Scanning Stage
Motorized Precision Linear Stage Voice-Coil Scanning System

V-106 Long-Travel, High-Dynamics Scanning Table with Voice Coil Drives


  • Fast Scanning and Positioning
  • Scanning Frequency 10s of Hz
  • Motion Ranges of 20 mm and 6 mm
  • Velocity up to 270 mm/s
  • 0.1 Micro-MeterLinear Encoder
  • Available PCI-Card Controller with On-Board Amplifiers
Description | Technical Data / Drawings | Ordering Info | PDF
Vertical Translational Stages
Motorized Precision Linear Stage Vertical Micropositioning Stage

M-501 Vertical Micropositioning Stage


  • High Resolution Vertical Translational Stage
  • Motion Range 12.5 mm (1/2")
  • Ultra-High-Resolution Encoder
  • ActiveDrive™ Motor
  • Compatible with Leading Industrial Motion Controllers
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Non-Contact Origin and Limit Switches
  • >20,000 Hours MTBF

Back to Top
Parametric Search      Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage

M-451 High-Load Vertical Micropositioning Stage


  • High Precision Vertical Translational Stage
  • 3 Nanometer Design Resolution
  • 12 kg Load Capacity, High Stiffness
  • <100 Nanometer Minimum Incremental Motion
  • 12.5 mm (1/2") Motion Range
  • ActiveDrive™ Motor
  • Compatible with Leading Industrial Motion Controllers
  • Non-Contact Origin and Limit Switches
  • Mounting Platform for P-500 and PIMars™ Piezo- Nanopositioning Systems
  • Self Locking

Description | Technical Data / Drawings | Ordering Info | PDF
Motorized Precision Linear Stage High-Load Vertical Micropositioning Stage

M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage


  • Precision Table for Vertical Positioning Applications
  • Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives
  • 2 Nanometer Linear Encoder Resolution
  • High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load
  • Active Compensation of Stick/Slip During Startup and Settling
  • Active Backlash Compensation
  • Excellent Velocity Control
  • Millisecond Settling to Nanometer Accuracy
  • Reliable Execution of Minimal Increments


Description | Technical Data / Drawings | Ordering Info | PDF
More PI Products...

Rotary Stages



Hexapods



Flexure Stages



Nanopositioning Controllers

Nanofocusing Scanning Objectives

Miniature Precision Linear Stage Catalog