Precision Linear Stage: Translation Stages: Motorized / Piezoelectric Micropositioning & Nanopositioning Table, Translational Stage for Ultra Precision Motion Control Applications; Linear Slide, Linear Table, XY Stage, XY Table, XYZ-Stage, XYZ-Table

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Precision Linear Stage: Motorized / Piezoelectric Micropositioning and Nanopositioning Stages for Ultra Precision Motion Control Applications

Miniature Stages w/ Servo / Stepper Motors Miniature Stages Lead-/Ball- Screw Drive Travel: to 25 mm or 360°	Long Travel Stages w/ Servo / Stepper Motors Travel: to 306 mm (12") Forces to 200 N Resolution to 50 nm	Hybrid Ultra-Precision Linear Stage Forces to 100 kN Sub-nm Resolution Fast Response	Voice Coil-Driven Linear Stage Scanning Freq:10s of Hz Velocity to 270 mm/s Travel: 20 mm / 6 mm	Motorized Vertical Stages ActiveDrive™ Motor Fast Response Travel: to 12.5 mm (1/2")

Compact Piezo Motor- Driven Linear Stage Speed to 800 mm/sec Acceleration to 20 g Self-Locking, Non- Magnetic, Vacuum Compatible	XY Piezo Motor Linear Stage 0.1 µm Resolution Travel: to 25 x 25 mm Low Profile, Compact Dimensions	Piezo Flexure Linear Nanopositioning Stages Fast Scanning Sub-Millisecond Response Sub-nm Precision	Linear Actuators Travel: 10 mm-50 mm Forces to 600 N Resolution to Sub-nm	Motion Controllers Servo/Stepper/ Piezomotor Options 1-18 Channel Options PC-Card, OEM / Rack-mount

PI is the world leader in precison linear stages positioning systems. In addition to linear tables, PI also offers a wide selection of innovative motorized piezoelectric nanopositioning and micropositioning stages for ultra precision motion control applications, and precision positioning stages for scientific and industrial applications.

Advantages: ultra-compact precision stages; choice of drives (piezo linear motor, voice-coil linear motor, or DC-servo / stepper with ballscrew or leadscrew); choice of integration (integrated servo driver, integrated controller); piezo-upgrades.

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Linear Translational Stages


		M-122 Fast Miniature Linear Stage with Integrated Optical Linear Encoder Compact and High Precision Linear Table Travel Range 25 mm 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability Min. Incremental Motion to 0.2 µm Max. Velocity 20 mm/s Cross-Roll Bearings Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-110.2 - M-112.2 High-Resolution Micro-Linear Stages with Ballscrew Drive Small Precision Linear Traslational Tables, 5 to 25 mm Travel Ranges 5000 h MTBF Very Cost Effective 200 Nanometer Minimum Inc. Motion Hall - Effect Limit & Reference Switches Recirculating Ballscrew for Extended Lifetime
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		N-661 - Miniature Linear Table with NEXACT^® Piezo Stepping Motor Drive High Resolution Linear Translational Stage with Closed Loop Motor Travel Range 20 mm Self Locking at Rest, no Heat Generation, no Servo Dither Compact Design: 70 x 50 x 20 mm Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution** Up to 10 N Force Generation
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		N-664 High-Resolution Translation Table with NEXACT^® Piezo Stepping Motor Drive Travel range 30 mm Encoder resolution 0.5 nm Minimal incremental motion 2 nm Excellent guiding accuracy Max. velocity 10 mm/s
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		M-661 - M-662 PILine^® Miniature Linear Stages with Ultrasonic Piezo Linear Motors Smallest Linear Table with High-Speed Linear Motor Drive 20 mm Travel Range Velocity to 500 mm/s Acceleration to 20 g Resolution to 50 Nanometer Self-Locking XY-Combinations Available 20000 h MTBF Vacuum Versions to 10^-7 hPa
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-663 PILine^® Miniature Linear Stage with Closed-Loop Ultrasonic Piezo Linear Motors Smallest Linear Table with Closed-Loop Linear Motor Drive and Linear Encoder 20 mm Travel Range Velocity up to 500 mm/s Accelerations up to 20 g Resolution to 0.1 Micron Integrated Direct-Metrology Linear Encoder AutoLock Feature XY Combinations Available 20,000 h MTBF Vacuum Versions Available
Product Description \| Specs / Drawings \| Ordering Info \| PDF




		M-664 PILine^® Low Profile Linear Stage with Closed-Loop Ultrasonic Piezo Linear Motors Compact and High Precision Linear Table, with 25 mm Travel Range Max. Velocity 400 mm/s Ultra-Low Profile, 15 mm Direct Metrology Linear Encoder with 0.1 µm Resolution High Guiding Accuracy with Crossed Roller Bearings Compact XY Combinations Piezo Linear Motor with 6 N Drive Force Self Locking at Rest
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		M-683 Precision Micro Translational Stage Low-Profile & High-Speed with Ultrasonic Piezomotor, Direct Position Metrology Low Profile Linear Table: Only 21 mm Height Max. Velocity 350 mm/ Compact XY Combination Possible Up to 6 N Force Generation Direct Metrology Linear Encoder, 0.1 µm Resolution Travel Ranges 50 mm Excellent Guiding Accuracy Through Crossed Roller Bearings PILine®: Non-Magnetic and Vacuum-Compatible Working Principle Self-Locking at Rest
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		M-686 Low-Profile XY Open-Frame Piezomotor Stage with Linear Encoders XY Linear Table: 25 x 25 mm Travel Ranges Integrated Closed-Loop Piezomotor Drives Provide High Speed to 100 mm/s Integrated Linear Encoders with 0.1 µm Resolution Compact Design; 27 mm Profile Height, 150 x 150 mm Footprint Large Clear Aperture 78 x 78 mm, 66 x 66 mm in Extreme Position Self-Locking at Rest Compatible with PI Piezo Nanopositioning / Scanning stages
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		M-311 – M-318 Miniature Linear Stage Extremely Compact Linear Table Family All-Stainless-Steel Construction X, XY and XYZ Versions Optional PiezoMike for Nanometer Resolution 4 mm Clear Aperture Linear Ball Bearings
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		M-011 Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings Precision Linear Table with extremely Straight / Flat Motion: ≤ 0.2 Micron Travel Range to 15 mm Compact Side Drive PZT Drive for Scanning and Tracking Applications 0.1 Micron Resolution with Closed-Loop DC Motor 5 Nanometer Resolution with Closed-Loop PZT Drive
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		M-014 Ultra-High-Precision, Side-Drive Stage with Magnetic-Kinematic Bearings Precision Linear Table with extremely Straight / Flat Motion: ≤ 0.3 Micron Travel Range 25 mm Compact Side Drive PZT Drive for Scanning and Tracking Applications 0.1 Micron Resolution with Closed-Loop DC Motor 5 Nanometer Resolution with Closed-Loop PZT Drive 30 mm Ø Clear Aperture
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		M-126 Translation Stage with Crossed Roller Bearings Economical High Precision inear Table with 25 mm Travel Range Manual, DC-Servo and Stepper-Motor Drives ActiveDrive™ Option Compatible with Leading Industrial Motion Controllers Crossed Roller Bearings <0.1 Micron Resolution XY and XYZ Combinations Direction-Sensing Origin Switch Non-Contact Limit Switches
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		M-403, M-404, M-413, M-414 High-Resolution Linear Stage with Stepper and DC Motor Drives Cost-Effective Linear Table Family Modular System with 4 Series: M-403, M-404, M-413, M-414 Preloaded Leadscrews or Recirculating Ball Screws Travel Ranges from 25 to 300 mm Stress-Relieved Aluminum Base 80 and 120 mm Width Minimum Incremental Motion to 0.1 Micron Resolution to 0.017 Micron
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		M-400 Series High-Precision Linear Stages with Crossed Roller Bearings High-Precision Linear Table Series with 50, 100 & 150 mm Travel Stress-Relieved Aluminum Stage Base for Highest Stability Crossed Roller Bearings Manual, DC-Servo and Stepper-Motor Drives, ActiveDrive™ Option Compatible with Leading Industrial Motion Controllers Manual Knob for Convenient Position Adjustment Non-Contact Direction-Sensing Origin Switch Non-Contact Limit Switches
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-605 Ultra-Compact, High-Accuracy Linear Stage Ultra-Precision Linear Table with Integrated Linear-Scale Encoders Travel Ranges 25 mm (1") and 50 mm (2") Velocity up to 50 mm/sec. Active Drive™ Motors Compatible with Leading Industrial Motion Controllers Stress-Relieved Aluminum Stage Base for Highest Stability Zero-Backlash Recirculating Ballscrews Non-Contact, Direction-Sensing Origin Switch Non-Contact Limit Switches Load Capacity 20 kg >20,000 Hours MTBF
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-505 Low-Profile Linear Stages with Ballscrew Drives Precision Linear Table with Zero-Backlash Recirculating Ballscrews Travel Ranges to 150 mm (6 inches) Velocity up to 50 mm/sec. ActiveDrive™ Motors Compatible with Leading Industrial Motion Controllers Stress-Relieved Aluminum Stage Base for Highest Stability Non-Contact Direction-Sensing Origin Switch Non-Contact Limit Switches Load Capacity 100 kg > 20,000 Hours MTBF
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		M-511 · M-521 · M-531 Low-Profile, High-Load Linear Stages with Ballscrew Drives High-Load Linear Tables with Zero-Backlash Recirculating Ballscrews Travel Ranges to 306 mm (12") Velocity up to 125 mm/sec. ActiveDrive™ Motors Compatible with Leading Industrial Motion Controllers Linear-Scale Encoders for Highest Accuracy Stress-Relieved Aluminum Stage Base for Highest Stability Non-Contacting Origin and Limit Switches PIIntelliStage™ Version with Integrated Controller Load Capacity 100 kg >20000 Hours MTBF
Product Description \| Specs / Drawings \| Ordering Info \| PDF


		M-511.HD Long-Travel, High-Speed Nanopositioning Table Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives 4 Nanometer Linear Encoder Resolution 100 mm Travel Velocities to 125 mm/sec Active Compensation of Stick/Slip During Startup and Settling Active Backlash Compensation Excellent Velocity Control Millisecond Settling to Nanometer Accuracy Reliable Execution of Minimal Increments High Drive and Holding Forces with Minimal Power
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Voice Coil Scanning Stage


		V-106 Long-Travel, High-Dynamics Scanning Table with Voice Coil Drives Fast Scanning and Positioning Scanning Frequency 10s of Hz Travel Ranges of 20 mm and 6 mm Velocity up to 270 mm/s 0.1 Micron Linear Encoder Available PCI-Card Controller with On-Board Amplifiers
Product Description \| Specs / Drawings \| Ordering Info \| PDF


Vertical Translational Stages

		M-501 Vertical Micropositioning Stage High Resolution Vertical Translational Stage Travel Range 12.5 mm (1/2") Ultra-High-Resolution Encoder ActiveDrive™ Motor Compatible with Leading Industrial Motion Controllers Stress-Relieved Aluminum Stage Base for Highest Stability Zero-Backlash Recirculating Ballscrews Non-Contact Origin and Limit Switches >20,000 Hours MTBF
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		M-451 High-Load Vertical Micropositioning Stage High Precision Vertical Translational Stage 3 Nanometer Design Resolution 12 kg Load Capacity, High Stiffness <100 Nanometer Minimum Incremental Motion 12.5 mm (1/2") Travel Range ActiveDrive™ Motor Compatible with Leading Industrial Motion Controllers Non-Contact Origin and Limit Switches Mounting Platform for P-500 and PIMars™ Piezo- Nanopositioning Systems Self Locking
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		M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage Precision Table for Vertical Positioning Applications Hybrid Sytem Combines Advantages of Piezoelectrics and Electromagnetic Drives 2 Nanometer Linear Encoder Resolution High Holding Forces with Minimum Power Consumption, without Counterbalancing the Load Active Compensation of Stick/Slip During Startup and Settling Active Backlash Compensation Excellent Velocity Control Millisecond Settling to Nanometer Accuracy Reliable Execution of Minimal Increments
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More PI Products...

Rotary Stages	Hexapods	Flexure Stages	Nanopositioning Controllers	Nanofocusing Scanning Objectives	Miniature Stage Catalog Brochure